Preparation of a metal micro-nano electrode by femtosecond laser ablation and its electrochemical deposition characteristics

With the growing trend toward miniaturization and integration of electrochemical devices and systems, research on the electrochemical deposition characteristics of metal micro-nano electrodes has emerged as a focal point of interest. Femtosecond laser offers a green, flexible, and maskless method for fabricating such micro-nano electrodes. This paper presents a novel strategy for preparing functional micro-nano surfaces by integrating additive and subtractive manufacturing techniques. 3D micro-nano electrodes of various sizes are fabricated on Au-coated silicon wafers using femtosecond laser ablation, followed by investigation of their micro-nano scale electrochemical growth characteristics through electrochemical deposition technology. By systematically optimizing the key parameters of both femtosecond laser ablation and electrochemical deposition, diverse morphologies of metal electrode micro-nano composite structures can be achieved. These tailored structures hold promise for enabling multifunctional and high-performance electrochemical platforms that integrate sensitive detection, biomimetic materials, efficient catalysis, and energy storage capabilities.