Molybdenum Ion-Induced Adhesion of Colloidal Silica to Polyvinyl Acetal Brushes in Post-Chemical Mechanical Planarization Applications: Experiments and Multiscale Simulations
content in the colloidal silica system, enhancing interactions with PVAc brushes. Density functional theory further confirmed strong interactions among silica particles, Mo oxides, and PVAc through quantum chemical parameters such as electrostatic potential, HOMO, and LUMO.
Authors
- Jihoon Seo (ORCID: https://orcid.org/0000-0003-3946-6476)
- Palwasha Jalalzai (ORCID: https://orcid.org/0000-0002-7578-7237)
- In-Soo Kim (ORCID: https://orcid.org/0000-0001-6539-1776)
- Sangkyun Kim (ORCID: https://orcid.org/0000-0003-2746-9952)
- Byung‐Hyun Kim (ORCID: https://orcid.org/0000-0003-2493-5452)
- Gayoung Kim (ORCID: https://orcid.org/0000-0002-8755-1707)
- Junsang Lee (ORCID: https://orcid.org/0000-0003-4520-8967)
- Jin-Goo Park
- Tae-Gon Kim
- Sumit Kumar
Institutions
- Samsung (South Korea) (KR)
- Advanced Institute of Convergence Technology (KR)
- BIO Intelligence Service (France) (FR)
- Convergence (US)
- Hanyang University (KR)
Publication Details
- Journal
- ACS Applied Materials & Interfaces
- Published
- 2026-04-30
- DOI
- https://doi.org/10.1021/acsami.6c05073
- Primary Topic
- Advanced Surface Polishing Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- Hanyang University
- Samsung