Preparation and Anodic Bonding Performance of (PEG)10LiClO4/NaAlOSiO Solid Electrolyte for Packaging

In this study, a polyethylene glycol (PEG)-based solid electrolyte composite (PEG)10LiClO4/NaAlOSiO suitable for anodic bonding packaging was successfully fabricated via a combined ball milling and hot pressing process. The micromorphology, ion transport characteristics, and mechanical packaging properties of the composite were systematically investigated using characterization techniques including electrochemical impedance spectroscopy, X-ray diffraction, scanning electron microscopy, and anodic bonding performance tests. The results demonstrate that doping with NaAlOSiO molecular sieve can effectively reduce the crystallinity of the polymer matrix, construct more efficient carrier transport pathways, and simultaneously enhance the ionic conductivity and mechanical properties of the material. When the mass fraction of NaAlOSiO doping is 8 wt.%, the composite exhibits a room temperature ionic conductivity of up to 1.31 × 10−5 S·cm−1. Under room temperature and a bonding voltage of 800 V, the sample with this doping ratio achieves the optimal anodic bonding with metallic Al, and the tensile strength of the bonding interface reaches 5.93 MPa, showing excellent application prospects in micro–nano-packaging.