Failure analysis and evaluation of MEMS springs under shock loading

In view of the application requirements of MEMS springs for fuzes in high overload environments, the failure analysis and evaluation of MEMS springs under shock loads were carried out. Based on the Johnson-Cook intrinsic model, a dynamic simulation model of MEMS springs considering plastic deformation was established, and the pulse-width vs amplitude failure critical curves of the spring mass-block system under impact loads were obtained, and the load region was divided into safe load and failure load zones. Using the Mahit hammer impact system, impact failure tests were carried out on five MEMS spring prototypes with different line widths to obtain the failure characteristics of MEMS springs under different loads, and the test results basically coincided with the simulation results. Based on the logistic regression method, a logistic regression model of the failure characteristics of MEMS springs was established, and the model was evaluated and analyzed by ten-fold cross-validation, and the accuracy of the model reached 0.9, which indicates that the model can well analyze the failure characteristics of MEMS springs, and it provide a reference basis for the failure analysis and evaluation of MEMS springs under different impact environments.