Atomistic insights into EUV photoresist photolysis via full temporal dynamics
), and residual kinetic energy induces phenyl ring rotation. Our method provides a new way to simulate the photolysis processes based on density functional theory accuracy.
Authors
- Y. J. Li (ORCID: https://orcid.org/0009-0004-8360-7891)
- Dongdong Kang (ORCID: https://orcid.org/0000-0002-2986-5927)
- Jiayu Dai (ORCID: https://orcid.org/0000-0001-7423-7500)
- Jinsen Han (ORCID: https://orcid.org/0000-0002-9121-4324)
- Linwang Wang (ORCID: https://orcid.org/0000-0001-7061-2692)
Institutions
- National University of Defense Technology (CN)
- Chinese Academy of Sciences (CN)
- Institute of Semiconductors (CN)
Publication Details
- Journal
- Communications Chemistry
- Published
- 2026-04-27
- DOI
- https://doi.org/10.1038/s42004-026-02035-1
- Primary Topic
- Electron and X-Ray Spectroscopy Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00