Blade coating-based scalable assembly of electronically active, solution-processed 2D semiconductors

Two-dimensional (2D) materials have emerged as promising candidates for next-generation semiconductors owing to their superior electrical and mechanical characteristics. However, conventional synthesis methods, such as chemical vapor deposition and mechanical exfoliation, face challenges in achieving the large-area scalability and efficiency required for high-performance logic devices. To address these issues, this study demonstrates a scalable manufacturing process utilizing electrochemical exfoliation. This cost-effective solution-based method facilitates the production of high-quality 2D nanosheets by weakening the interlayer van der Waals forces of bulk crystals. The resulting n-type MoS2 and p-type WSe2 inks were uniformly deposited via a large-area blade coating technique. To mitigate defects generated during exfoliation, we employed a chemical passivation treatment using bis(trifluoromethane)sulfonimide (TFSI). The fabricated MoS2 and WSe2 thin-film transistors exhibited enhanced electrical performance, with significant improvements in carrier mobility (up to 10 and 5 cm2 V−1 s−1, respectively) and on/off current ratios (exceeding 105). Furthermore, by integrating these optimized n-type and p-type channel devices, we successfully demonstrated functional CMOS inverter logic circuits with a gain of ∼6. These results suggest that combining electrochemical exfoliation, defect engineering via TFSI, and blade coating offers a viable pathway for realizing large-scale 2D integrated circuits.

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Publication Details

Journal
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
Published
2026-04-22
DOI
https://doi.org/10.1116/6.0005398
Primary Topic
2D Materials and Applications
Type
article
Field-Weighted Citation Impact
0.00

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article

Blade coating-based scalable assembly of electronically active, solution-processed 2D semiconductors

Okin Song, J Y Kang, J Hong
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
2D Materials and Applications
article

Blade coating-based scalable assembly of electronically active, solution-processed 2D semiconductors

Okin Song, J Y Kang, J Hong
article en

Abstract

Two-dimensional (2D) materials have emerged as promising candidates for next-generation semiconductors owing to their superior electrical and mechanical characteristics. However, conventional synthesis methods, such as chemical vapor deposition and mechanical exfoliation, face challenges in achieving the large-area scalability and efficiency required for high-performance logic devices. To address these issues, this study demonstrates a scalable manufacturing process utilizing electrochemical exfoliation. This cost-effective solution-based method facilitates the production of high-quality 2D nanosheets by weakening the interlayer van der Waals forces of bulk crystals. The resulting n-type MoS2 and p-type WSe2 inks were uniformly deposited via a large-area blade coating technique. To mitigate defects generated during exfoliation, we employed a chemical passivation treatment using bis(trifluoromethane)sulfonimide (TFSI). The fabricated MoS2 and WSe2 thin-film transistors exhibited enhanced electrical performance, with significant improvements in carrier mobility (up to 10 and 5 cm2 V−1 s−1, respectively) and on/off current ratios (exceeding 105). Furthermore, by integrating these optimized n-type and p-type channel devices, we successfully demonstrated functional CMOS inverter logic circuits with a gain of ∼6. These results suggest that combining electrochemical exfoliation, defect engineering via TFSI, and blade coating offers a viable pathway for realizing large-scale 2D integrated circuits.

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and PhenomenaVol. 44(3)
Yonsei University (KR), Sungkyunkwan University (KR)
National Research Foundation of Korea
Openalex Percentile: Top 10%
2D Materials and Applications
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Blade coating-based scalable assembly of electronically active, solution-processed 2D semiconductors — Okin Song, J Y Kang, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena (2026) | TGRS Research Map | TGRS