Solvent-Tunable Orientation and Confinement-Induced Feature Compression in High-χ Cylindrical Block Copolymer Thin Films

, fingerprint-like patterns gradually formed due to the weakening of template confinement effects. These findings demonstrate the potential of high-χ BCPs for fabricating periodic dense line arrays suitable for advanced technology nodes. This study provides new insights into solvent-tunable orientation control and template compatibility mechanisms, contributing significantly to the advancement of nanofabrication technology.

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Publication Details

Journal
ACS Applied Materials & Interfaces
Published
2026-04-21
DOI
https://doi.org/10.1021/acsami.6c00516
Primary Topic
Block Copolymer Self-Assembly
Type
article
Field-Weighted Citation Impact
0.00

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article

Solvent-Tunable Orientation and Confinement-Induced Feature Compression in High-χ Cylindrical Block Copolymer Thin Films

Rongqing Huang, Wanqing Wu, X Li, Q WU et al.
ACS Applied Materials & Interfaces
Block Copolymer Self-Assembly
article

Solvent-Tunable Orientation and Confinement-Induced Feature Compression in High-χ Cylindrical Block Copolymer Thin Films

Rongqing Huang, Wanqing Wu, X Li, Q WU, Xianhe Liu, Haoyong Wang
article en

Abstract

, fingerprint-like patterns gradually formed due to the weakening of template confinement effects. These findings demonstrate the potential of high-χ BCPs for fabricating periodic dense line arrays suitable for advanced technology nodes. This study provides new insights into solvent-tunable orientation control and template compatibility mechanisms, contributing significantly to the advancement of nanofabrication technology.

ACS Applied Materials & InterfacesVol. 18(17)
East China University of Science and Technology (CN), Fudan University (CN)
National Natural Science Foundation of China, Fundamental Research Funds for the Central Universities
Openalex Percentile: Top 23%
Block Copolymer Self-Assembly
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