Selective laser-induced etching process-enabled double-cavity glass MEMS hydrogen sensor at room-temperature sensitivity

dissociation and spillover, enabling chemiresistive transduction at room temperature. Finite-element simulations and infrared thermography show that under identical electrical drive, the low-thermal-conductivity glass and double-cavity architecture suppress heat loss and maintain the sensing region ~10 °C higher than planar counterparts. This thermal advantage translates directly into an order-of-magnitude (~10 times) increase in sensitivity at room temperature. By integrating a simplified, bonding-free single glass wafer process with a Pt/NCS-functionalized suspended membrane, this work establishes a scalable, economical, and reliable platform for high-performance, room-temperature hydrogen sensing in microsystem applications.