A Novel Fixed-Bed Process Integrated with Additional Disproportionation Reactors for Silane Production

With the increase in the demand for electronic-grade high-purity silane in the semiconductor chip industry, it is of great significance to develop a green and economical method for silane production. Therefore, a novel energy-saving fixed-bed process was proposed innovatively. In this paper, the thermodynamics and kinetics of the trichlorosilane disproportionation system were studied, and the optimal reaction conditions for the resin catalyst were determined, which were used for the subsequent simulation. Based on the conventional DR1 + DR2 process (which includes one trichlorosilane disproportionation reactor (DR1) and one dichlorosilane disproportionation reactor (DR2)), by adding an additional disproportionation reactor to the TCS recycle loop and/or DCS recycle loop, three improved process configurations were designed, including 2DR1 + DR2, DR1 + 2DR2, and 2DR1 + 2DR2 processes. Then, combined with four-column heat integration, the HI + 2DR1 + 2DR2 process was proposed to solve the bottleneck problems of high energy consumption and large circulation flow rate. The results show that the HI + 2DR1 + 2DR2 process achieved the best energy-saving effect. The TCS recycle loop flow rate reduced by 36.87%, the DCS recycle loop flow rate reduced by 12.41%, total energy consumption decreased by 62.8%, and CO2 emissions decreased by 56.72%. The unit energy consumption is 13.8 kg steam/kg SiH4, and the silane purity is greater than 99.9999%. This design can be easily applied to the existing production process of the silane plant, achieving energy-saving and low-cost production of silane.