Epitaxial Growth of ⟨100⟩-Oriented Ultrathin (∼4 nm) Continuous Pt Films on MgO(001) and SrTiO <sub>3</sub> (001) Substrates by Radio Frequency Magnetron Sputtering

(001) substrates. This involved first depositing an underlayer of Fe or Pt/Cu using vacuum evaporation at room temperature, followed by Pt sputtering deposition at 450 °C. The longitudinal electrical resistivities at room temperature were also sufficiently low (≤30 μΩ cm).

Authors

Takashi Suemasu (ORCID: https://orcid.org/0000-0001-6012-4986)
Yuki Sobukawa
Soshi Akita
Tomohiro Yasuda

Institutions

University of Tsukuba (JP)
Academic Degrees & Graduate Education (CN)
Applied Physical Sciences (United States) (US)

Publication Details

Journal: ACS Applied Materials & Interfaces
Published: 2026-04-17
DOI: https://doi.org/10.1021/acsami.6c03772
Primary Topic: Electronic and Structural Properties of Oxides
Type: article
Field-Weighted Citation Impact: 0.00

Funders

Japan Society for the Promotion of Science

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article

Epitaxial Growth of ⟨100⟩-Oriented Ultrathin (∼4 nm) Continuous Pt Films on MgO(001) and SrTiO ₃ (001) Substrates by Radio Frequency Magnetron Sputtering

Takashi Suemasu, Yuki Sobukawa, Soshi Akita, Tomohiro Yasuda

Apr 17, 2026

ACS Applied Materials & Interfaces

Electronic and Structural Properties of Oxides

article

Epitaxial Growth of ⟨100⟩-Oriented Ultrathin (∼4 nm) Continuous Pt Films on MgO(001) and SrTiO ₃ (001) Substrates by Radio Frequency Magnetron Sputtering

Takashi Suemasu, Yuki Sobukawa, Soshi Akita, Tomohiro Yasuda

April 17, 2026article en

Abstract

(001) substrates. This involved first depositing an underlayer of Fe or Pt/Cu using vacuum evaporation at room temperature, followed by Pt sputtering deposition at 450 °C. The longitudinal electrical resistivities at room temperature were also sufficiently low (≤30 μΩ cm).

ACS Applied Materials & InterfacesVol. 18(16)

University of Tsukuba (JP), Academic Degrees & Graduate Education (CN), Applied Physical Sciences (United States) (US)

Japan Society for the Promotion of Science

Openalex Percentile: Top 22%

Electronic and Structural Properties of Oxides

DOI Source OpenAlex

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