Design and Research of 2-DOF Piezoelectric Nanopositioning Stage with Multiple Displacement Amplifiers and Decoupling Beams

A piezoelectric (PZT) nanopositioning stage with large stroke and low crosstalk is relatively appealing for microdisplacement operation. Rhombus and lever amplifiers are used to increase the overall displacement amplification ratio (DAR), and the symmetry of the amplification structure reduces the coupling error. At the same time, decoupling beams are used to balance the stiffness in the x- and y-directions, thereby reducing the crosstalk of the stage. Theoretical analysis, kinematics modeling, and finite element simulation were carried out to verify the feasibility of the PZT nanopositioning stage, and an experimental prototype was manufactured. The prototype test results indicate that the workspace of the stage is 312 μm × 312 μm, the DAR is approximately 9.3, and the first natural frequency is approximately 76 Hz. Moreover, the area efficiency is 6.03, which indicates that the stage is compact. The results prove that the developed stage possesses a good property for microdisplacement operation.