Elemental Analysis of Waste Circuit Boards Based on Monochromatic Micro X-Ray Fluorescence

Waste electronic components are valuable secondary resources containing various metals. Analyzing their elemental distribution is crucial for developing recycling methods. Micro- X-ray fluorescence (μ-XRF) is commonly used for this purpose, but traditional polychromatic X-ray excitation creates high background scattering. This masks trace element signals, impairing detection limits and accurate identification of minor valuable or hazardous elements. To address this, this study developed a monochromatic μ-XRF spectrometer using a low-power molybdenum-target X-ray tube. The system integrates polycapillary lenses for X-ray regulation and a flat crystal for monochromatization, producing a micron-sized monochromatic X-ray spot with high power density. This design eliminates scattered background from the primary continuous spectrum and enhances excitation efficiency by concentrating photon flux, enabling high-brightness monochromatic beams even at low tube power. The spectrometer was validated by analyzing a waste printed circuit board. High-resolution elemental mapping successfully revealed clear distribution patterns of major elements like copper, nickel, and iron, consistent with their physical structures. These images allowed intuitive differentiation of compositional differences across functional regions. This technique effectively overcomes the background interference caused by polychromatic excitation and is expected to further enhance the quality and reliability of elemental distribution imaging. It provides a powerful tool for formulating precise, scientific recycling strategies for waste electronics.