Authors

• Kathleen T. Smith (ORCID: https://orcid.org/0000-0002-7492-4789)
• Vladimir Protasenko (ORCID: https://orcid.org/0000-0002-8469-1157)
• Hardik Murarka
• Debdeep Jena (ORCID: https://orcid.org/0000-0002-4076-4625)
• Madhav Ramesh (ORCID: https://orcid.org/0000-0003-0396-561X)
• Thai‐Son Nguyen (ORCID: https://orcid.org/0000-0002-1193-834X)
• Chandrashekhar Savant (ORCID: https://orcid.org/0000-0001-7174-1103)
• Jimy Encomendero (ORCID: https://orcid.org/0000-0002-1597-1761)
• Huili Grace Xing (ORCID: https://orcid.org/0000-0002-2709-3839)
• Debaditya Bhattacharya (ORCID: https://orcid.org/0000-0002-9217-1813)
• Jayeesh Arora (ORCID: https://orcid.org/0000-0001-6383-7818)

Institutions

• Cornell University (US)

Publication Details

Journal

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Published

2026-04-16

DOI

https://doi.org/10.1116/6.0005402

Primary Topic

GaN-based semiconductor devices and materials

Type

article

Field-Weighted Citation Impact

0.00

Funders

• National Science Foundation
• Semiconductor Research Corporation
• Defense Sciences Office, DARPA