Evolution of Fused Silica Subsurface Damage in Chemical Etching and Its Influence on Surface Loss
, and most of the loss is caused by cracks in the near-surface layer. This work provides profound insights into the mechanism of surface loss caused by subsurface damage and holds guiding importance for the manufacture of fused silica resonators.
Authors
- Lidong Wang (ORCID: https://orcid.org/0000-0003-3985-0582)
- Y. Sun (ORCID: https://orcid.org/0000-0001-7549-8497)
- Yongchang Zhu (ORCID: https://orcid.org/0000-0002-9067-7220)
- Xuefu Song
- Xiurong Du
- Chengkui Zu
- Xiaoqiang Zhang
Institutions
- Harbin Institute of Technology (CN)
- China Building Materials Academy (CN)
Publication Details
- Journal
- Sensors
- Published
- 2026-04-16
- DOI
- https://doi.org/10.3390/s26082449
- Primary Topic
- Advanced Surface Polishing Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- National Natural Science Foundation of China