Electron drift velocity measurement of AlGaN/GaN single- and multi-channel Fin structures
This paper presents a method for extracting electron drift velocity vs electric field characteristics in AlGaN/GaN Fin structures by combining Fin-Hall bar and Fin-Transmission Line Model measurements. Carrier density and Ohmic contact resistivity were independently extracted as a function of Fin width, enabling accurate calculation of internal electric field and drift velocity from pulsed I–V curves. It is revealed that the drift velocity decreases with the narrowing of Fin width due to enhanced sidewall influence, and multi-channel structures show higher drift velocity thanks to weaker interaction between electrons and longitudinal optical phonons. This measurement method provides a quantitative approach for studying carrier transport behavior under high electric field, offering a fundamental tool for Fin-based device design and modeling.
Authors
- Jialun Liu (ORCID: https://orcid.org/0000-0002-5606-7840)
- Xiaoning Zhan (ORCID: https://orcid.org/0000-0002-8259-250X)
- Yu Zhou (ORCID: https://orcid.org/0000-0001-7968-3323)
- Qingru Wang (ORCID: https://orcid.org/0009-0009-3754-7855)
- Qian Sun (ORCID: https://orcid.org/0000-0001-5495-2232)
- Quan Dai (ORCID: https://orcid.org/0000-0003-4508-4378)
- Meixin Feng
- Xinkun Zhang
- Cheng Li (ORCID: https://orcid.org/0009-0004-9725-3131)
- Jiaanli Wang
- Qian Li
Institutions
- University of Science and Technology of China (CN)
- Chinese Academy of Sciences (CN)
- Suzhou Institute of Nano-tech and Nano-bionics (CN)
Publication Details
- Journal
- Applied Physics Letters
- Published
- 2026-04-13
- DOI
- https://doi.org/10.1063/5.0314039
- Primary Topic
- GaN-based semiconductor devices and materials
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- National Natural Science Foundation of China
- Youth Innovation Promotion Association of the Chinese Academy of Sciences
- Basic Research Program of Jiangsu Province
- National Key Research and Development Program of China
- Basic and Applied Basic Research Foundation of Guangdong Province