Electrostatically Reconfigurable Gas Sensing Units and Arrays Based on Carbon Nanotube Transistors

maintains a measurable response under elevated humidity (64 at 45% RH). The combined field-dependent and time-resolved behavior produces clear separation in PCA and classification accuracies exceeding 90% within 3 min. Integrating arrays of the reconfigurable gas-sensing units via back-end-of-line (BEOL) processing on silicon-based complementary metal-oxide-semiconductor (CMOS) integrated circuits provides a viable pathway toward real-time, high-precision, multitarget gas-sensor systems.