Reversible Thickness Engineering in Amorphous In <sub>2</sub> O <sub>3</sub> Transistors

transistor performance, facilitating doping-free modulation of the threshold voltage and reversible switching between depletion- and enhancement-mode operation within a single device. Successful demonstration of inverters and ring oscillators confirms the robustness of this technique, establishing film thickness as a core design parameter for oxide semiconductors and paving the way for reconfigurable electronics.

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Publication Details

Journal
Nano Letters
Published
2026-04-13
DOI
https://doi.org/10.1021/acs.nanolett.5c06228
Primary Topic
Thin-Film Transistor Technologies
Type
article
Field-Weighted Citation Impact
0.00

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article

Reversible Thickness Engineering in Amorphous In 2 O 3 Transistors

Shih-Chieh Chen, Der‐Hsien Lien, T. Kimura, Sung-Tsun Wang et al.
Nano Letters
Thin-Film Transistor Technologies
article

Reversible Thickness Engineering in Amorphous In 2 O 3 Transistors

Shih-Chieh Chen, Der‐Hsien Lien, T. Kimura, Sung-Tsun Wang, Yi-Yu Pan, Robert Tseng, Yann-Wen Lan, Yu-Cheng Chang, Chu-Hsiu Hsu
article en

Abstract

transistor performance, facilitating doping-free modulation of the threshold voltage and reversible switching between depletion- and enhancement-mode operation within a single device. Successful demonstration of inverters and ring oscillators confirms the robustness of this technique, establishing film thickness as a core design parameter for oxide semiconductors and paving the way for reconfigurable electronics.

Nano Letters
National Taiwan Normal University (TW), Kyushu University (JP), Pioneer (United States) (US), National Yang Ming Chiao Tung University (TW)
National Science and Technology Council
Openalex Percentile: Top 19%
Thin-Film Transistor Technologies
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