Facile, etch-free atomic layer-coated resist templates for rapid prototyping of efficient visible metasurfaces
coating reveal a fourfold improvement in diffraction efficiency, validating the critical role of the high-index shell. The proposed method can offer a robust route to the prototype-to-production of flat optical components for next-generation display, imaging, and photonic systems.
Authors
- Junhwa Seong (ORCID: https://orcid.org/0000-0002-3171-9507)
- Yong‐Sang Ryu (ORCID: https://orcid.org/0000-0002-3222-4231)
- Jihwan An (ORCID: https://orcid.org/0000-0002-7697-9935)
- Seokwoo Kim (ORCID: https://orcid.org/0000-0001-5076-148X)
- Youngsun Jeon
- Chanbeom Jeon
- Sangwon Lee
- Junsuk Rho (ORCID: https://orcid.org/0000-0002-2179-2890)
- Jaekyung Kim
Institutions
- Pohang University of Science and Technology (KR)
- Pohang Iron and Steel (South Korea) (KR)
- Korea University (KR)
Publication Details
- Journal
- Microsystems & Nanoengineering
- Published
- 2026-04-13
- DOI
- https://doi.org/10.1038/s41378-026-01238-9
- Primary Topic
- Nanofabrication and Lithography Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- National Research Foundation
- Pohang University of Science and Technology
- Ministry of Trade, Industry and Energy
- Korea Health Industry Development Institute
- Ministry of Education, India
- Ministry of Science and ICT, South Korea
- Advanced Research Projects Agency
- Korea Evaluation Institute of Industrial Technology