Visualization of wavefront aberrations by Zernike polynomials
Zernike aberration coefficients are typically presented in tabular form or as simple bar graphs, making it difficult to intuitively interpret their meaning and relate them to the specific aberration term. In this work, we present intuitive and rapidly interpretable visual representations of Zernike aberration terms that highlight the magnitude and orientation of their dominant contributions. Depending on the aberration order, we recommend different graphical formats – such as bubble plots and heatmaps – for visualizing low-order and mid-spatial frequency Zernike terms. These graphical representations are particularly valuable when quick visual feedback on individual aberration terms is needed, such as during aberration compensator adjustment, real-time wavefront visualization of dynamic processes, or optical alignment procedures. They can also enhance the clarity and interpretability of inspection reports or measurement certificates. Furthermore, an alternative definition of the azimuthal orientation of Zernike terms with m ≠ 0 is proposed, enabling a more effective analysis of the shape and bending of spoke-shaped aberrations.
Authors
- Stephan Reichelt (ORCID: https://orcid.org/0000-0001-5556-0708)
Publication Details
- Journal
- Springer Link (Chiba Institute of Technology)
- Published
- 2026-06-09
- DOI
- https://doi.org/10.1051/jeos/2026034/pdf
- Primary Topic
- Advancements in Photolithography Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00