Visualization of wavefront aberrations by Zernike polynomials

Zernike aberration coefficients are typically presented in tabular form or as simple bar graphs, making it difficult to intuitively interpret their meaning and relate them to the specific aberration term. In this work, we present intuitive and rapidly interpretable visual representations of Zernike aberration terms that highlight the magnitude and orientation of their dominant contributions. Depending on the aberration order, we recommend different graphical formats – such as bubble plots and heatmaps – for visualizing low-order and mid-spatial frequency Zernike terms. These graphical representations are particularly valuable when quick visual feedback on individual aberration terms is needed, such as during aberration compensator adjustment, real-time wavefront visualization of dynamic processes, or optical alignment procedures. They can also enhance the clarity and interpretability of inspection reports or measurement certificates. Furthermore, an alternative definition of the azimuthal orientation of Zernike terms with m ≠ 0 is proposed, enabling a more effective analysis of the shape and bending of spoke-shaped aberrations.

Authors

Publication Details

Journal
Springer Link (Chiba Institute of Technology)
Published
2026-06-09
DOI
https://doi.org/10.1051/jeos/2026034/pdf
Primary Topic
Advancements in Photolithography Techniques
Type
article
Field-Weighted Citation Impact
0.00
Controls
|||
ALL TIME
JAN
FEB
MAR
APR
MAY
JUN
JUL
AUG
SEP
OCT
article

Visualization of wavefront aberrations by Zernike polynomials

Stephan Reichelt
Springer Link (Chiba Institute of Technology)
Advancements in Photolithography Techniques
article

Visualization of wavefront aberrations by Zernike polynomials

Stephan Reichelt
article en

Abstract

Zernike aberration coefficients are typically presented in tabular form or as simple bar graphs, making it difficult to intuitively interpret their meaning and relate them to the specific aberration term. In this work, we present intuitive and rapidly interpretable visual representations of Zernike aberration terms that highlight the magnitude and orientation of their dominant contributions. Depending on the aberration order, we recommend different graphical formats – such as bubble plots and heatmaps – for visualizing low-order and mid-spatial frequency Zernike terms. These graphical representations are particularly valuable when quick visual feedback on individual aberration terms is needed, such as during aberration compensator adjustment, real-time wavefront visualization of dynamic processes, or optical alignment procedures. They can also enhance the clarity and interpretability of inspection reports or measurement certificates. Furthermore, an alternative definition of the azimuthal orientation of Zernike terms with m ≠ 0 is proposed, enabling a more effective analysis of the shape and bending of spoke-shaped aberrations.

Springer Link (Chiba Institute of Technology)
Openalex Percentile: Top 54%
Advancements in Photolithography Techniques
AI Navigator

Ask Laika to Summarize, Analyze, and Connect papers live on the map.

Summarize Papers & Methodologies

Extract key findings, datasets, and comparative methods across publications.

Benchmark Rankings & Visual Analytics

Rank top research institutions, authors, funders, topics, and journals by Field-Weighted Citation Impact (FWCI) and paper volume with instant charts.

Connect Distant Disciplines

Bridge topological clusters on the map to find hidden collaborative intersections.

Visualization of wavefront aberrations by Zernike polynomials — Stephan Reichelt · Springer Link (Chiba Institute of Technology) (2026) | TGRS Research Map | TGRS