Sub-6 GHz acoustic filters using laterally-excited bulk acoustic resonator with scattering vias in double-layer electrodes

Authors

Rong Wang (ORCID: https://orcid.org/0000-0001-8257-0282)
Ye Liu (ORCID: https://orcid.org/0000-0002-8473-6538)
Wei Liu (ORCID: https://orcid.org/0000-0002-7409-0948)
Jieyu Liu (ORCID: https://orcid.org/0000-0002-1230-7099)
Zhiwei Wen
Min Zeng
Yuanhang Qu
Yao Cai

Institutions

Wuhan University of Technology (CN)
Wuhan University (CN)
Wuhan Donghu University (CN)
Wuhan Textile University (CN)
Wuhan Institute of Technology (CN)

Publication Details

Journal: Microsystems & Nanoengineering
Published: 2026-04-03
DOI: https://doi.org/10.1038/s41378-026-01204-5
Primary Topic: Acoustic Wave Resonator Technologies
Type: article
Field-Weighted Citation Impact: 0.00

Funders

National Natural Science Foundation of China
Wuhan University
Large-Scale Instrument and Equipment Sharing Foundation of Wuhan University

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article

Sub-6 GHz acoustic filters using laterally-excited bulk acoustic resonator with scattering vias in double-layer electrodes

Rong Wang, Ye Liu, Wei Liu, Jieyu Liu et al.

Apr 3, 2026

Microsystems & Nanoengineering

Acoustic Wave Resonator Technologies

article

Sub-6 GHz acoustic filters using laterally-excited bulk acoustic resonator with scattering vias in double-layer electrodes

Rong Wang, Ye Liu, Wei Liu, Jieyu Liu, Zhiwei Wen, Min Zeng, Yuanhang Qu, Yao Cai

April 3, 2026article en

Abstract

No abstract available for this paper.

Microsystems & NanoengineeringVol. 12(1)

Wuhan University of Technology (CN), Wuhan University (CN), Wuhan Donghu University (CN), Wuhan Textile University (CN), Wuhan Institute of Technology (CN)

National Natural Science Foundation of China, Wuhan University, Large-Scale Instrument and Equipment Sharing Foundation of Wuhan University

Affordable and clean energy

Openalex Percentile: Top 34%

Acoustic Wave Resonator Technologies

DOI Open Access PDF OpenAlex

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