Improvements in optical metrology for high-performance variable-line-spacing x-ray gratings
We discuss a project to develop a precision metrology system for variable-line-spacing x-ray gratings using interferometric microscopes. We are developing test standards and calibration techniques to measure and correct for geometrical distortion and blur, and data processing techniques to combine multiple measurements and measure line spacing with high accuracy.
Authors
- Ian Lacey (ORCID: https://orcid.org/0000-0001-5277-1067)
- Simon Rochester (ORCID: https://orcid.org/0000-0001-5202-5718)
- Valeriy V. Yashchuk (ORCID: https://orcid.org/0000-0001-7970-2862)
- Keiko Munechika (ORCID: https://orcid.org/0000-0002-0375-8429)
- Kaito Yamada
- Peter Z. Takacs
Institutions
- Lawrence Berkeley National Laboratory (US)
- Teradyne (United States) (US)
- Interface (United States) (US)
- ISCO International (United States) (US)
Publication Details
- Journal
- Review of Scientific Instruments
- Published
- 2026-04-01
- DOI
- https://doi.org/10.1063/5.0301612
- Primary Topic
- Advanced X-ray Imaging Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- Small Business Innovation Research and Small Business Technology Transfer
- Office of Science