High-performance integrated silicon LiDAR enabled by combined shallow and full etching

, and transmission fluctuations confined within 6.42%. The system uses a coarse wavelength-division multiplexing (CWDM) laser array as the light source and supports bidirectional waveguide propagation, achieving a 28° scanning field of view (FOV) over a 60 nm wavelength range.

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Publication Details

Journal
Applied Optics
Published
2026-04-01
DOI
https://doi.org/10.1364/ao.592178
Primary Topic
Advanced Optical Sensing Technologies
Type
article
Field-Weighted Citation Impact
0.00

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article

High-performance integrated silicon LiDAR enabled by combined shallow and full etching

Zhongqi Pan, Chengkun Yang, Qiang Wang, Qi Yun et al.
Applied Optics
Advanced Optical Sensing Technologies
article

High-performance integrated silicon LiDAR enabled by combined shallow and full etching

Zhongqi Pan, Chengkun Yang, Qiang Wang, Qi Yun, Yang Yue
article en

Abstract

, and transmission fluctuations confined within 6.42%. The system uses a coarse wavelength-division multiplexing (CWDM) laser array as the light source and supports bidirectional waveguide propagation, achieving a 28° scanning field of view (FOV) over a 60 nm wavelength range.

Applied OpticsVol. 65(12)
Shanghai Zhangjiang Laboratory (CN), University of Louisiana at Lafayette (US), Xi'an Jiaotong University (CN)
Natural Science Foundation of Shanxi Province
Openalex Percentile: Top 26%
Advanced Optical Sensing Technologies
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