Chemical Vapor Transformation of Lithium Carbonate during Plasma-Assisted ALD Growth of Lithium Phosphate
. This work demonstrates that this chemical vapor transformation mechanism, so far only investigated for surface cleaning of battery electrodes, can also be utilized in ALD supercycles of Li compounds to obtain films without carbonate impurities.
Authors
- M. Creatore
- N. T. Hoogendoorn
- M. J. Pieters
- C. Van Helvoirt
Institutions
- Eindhoven University of Technology (NL)
Publication Details
- Journal
- The Journal of Physical Chemistry C
- Published
- 2026-04-01
- DOI
- https://doi.org/10.1021/acs.jpcc.6c00538
- Primary Topic
- Advancements in Battery Materials
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- Technische Universiteit Eindhoven
- Nederlandse Organisatie voor Wetenschappelijk Onderzoek