Silicon Photonic Beam Steerer Based on Metalens Focal Plane Array

ABSTRACT Focal plane arrays (FPAs) promise robust solid‐state beam steering for LiDAR and free‐space optical communications. However, the need for external collimation lenses hinders chip‐scale compactness. Discrete switching between FPA elements further introduces blind spots and limits the number of resolvable points, restricting applications that require continuous tracking. Here, we demonstrate a silicon photonic beam steerer based on a metalens FPA that monolithically integrates the collimation lens on‐chip. Thermo‐optic prisms enable continuous fine‐tuning, eliminating blind spots and doubling the number of resolvable points. Continuous steering over a 62° field of view is achieved while maintaining high beam quality, with an average sidelobe suppression ratio of 19 dB.