基于Ta2O5的多层介质膜光波导

Abstract Extreme environments such as space optical communication and nuclear power plants impose strict require ments on the reliability and stability of photonic integrated devices.Traditional silicon-based waveguides face a serious risk of performance degradation in the above scenarios mainly due to their inherent insufficient radiation resistance and chemical sensitivity.For this purpose this paper designs and studies a new type of optical waveguide based on Ta 2 O 5 with radiation resistance and chemical stability.The waveguide structure was designed and optimized based on classical electromagnetic theory and experiments verified that the waveguide has low loss and ideal optical mode limitation capa bility.In addition its preparation process is compatible with existing semiconductor technologies and has good integra tion potential.It can be further fabricated into FP (Fabry-Prot cavity) waveguides grating waveguides and other mode-