In-situ tools, sample designs and protocols (D3.2)
A new in-situ set-up for thermal cycling of copper on silicon (polyheater) samples has been established at IKTS. An exemplary sample was imaged using X-ray transmission imaging, validating the set-up functionality. New sample layouts for 3D imaging were designed and produced at Infineon Technologies Austria and KAI, but could not yet be imaged due to production delays.
Authors
- Laura Neumann
Institutions
- Fraunhofer Institute for Ceramic Technologies and Systems (DE)
Publication Details
- Journal
- Zenodo (CERN European Organization for Nuclear Research)
- Published
- 2025-10-28
- DOI
- https://doi.org/10.5281/zenodo.19238867
- Primary Topic
- Silicon and Solar Cell Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00