In-situ tools, sample designs and protocols (D3.2)

A new in-situ set-up for thermal cycling of copper on silicon (polyheater) samples has been established at IKTS. An exemplary sample was imaged using X-ray transmission imaging, validating the set-up functionality. New sample layouts for 3D imaging were designed and produced at Infineon Technologies Austria and KAI, but could not yet be imaged due to production delays.

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Publication Details

Journal
Zenodo (CERN European Organization for Nuclear Research)
Published
2025-10-28
DOI
https://doi.org/10.5281/zenodo.19238867
Primary Topic
Silicon and Solar Cell Technologies
Type
article
Field-Weighted Citation Impact
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article

In-situ tools, sample designs and protocols (D3.2)

Laura Neumann
Zenodo (CERN European Organization for Nuclear Research)
Silicon and Solar Cell Technologies
article

In-situ tools, sample designs and protocols (D3.2)

Laura Neumann
article en

Abstract

A new in-situ set-up for thermal cycling of copper on silicon (polyheater) samples has been established at IKTS. An exemplary sample was imaged using X-ray transmission imaging, validating the set-up functionality. New sample layouts for 3D imaging were designed and produced at Infineon Technologies Austria and KAI, but could not yet be imaged due to production delays.

Zenodo (CERN European Organization for Nuclear Research)
Fraunhofer Institute for Ceramic Technologies and Systems (DE)
Industry, innovation and infrastructure
Openalex Percentile: Top 33%
Silicon and Solar Cell Technologies
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In-situ tools, sample designs and protocols (D3.2) — Laura Neumann · Zenodo (CERN European Organization for Nuclear Research) (2025) | TGRS Research Map | TGRS