Multimodal Detection and Laser-Induced Damage Correlation of Real Surface Defects on Fused Silica Optics

Surface defects on fused silica optics significantly limit their laserinduced damage resistance under ultraviolet pulsed laser irradiation, yet a quantitative correlation between defect parameters and damage thresholds remains scarce.This study is the first to perform multimodal detection and correlation analysis of laser-induced damage initiated at real defects on fused silica.Scratches were characterized by scattered light intensity, width, and fluorescence intensity, and correlated with the damage-onset fluence (DOF).Results show trailing indent scratches (1.9-8.8 m wide) have DOFs of 1.27-13.2J/cm 2 , while plastic continuous scratches (0.4-5.8 m wide) exhibit