The role of nitrogen additive on the growth of ultrathin silver films: in situ and real-time studies during magnetron sputtering deposition

Authors

F. Pailloux (ORCID: https://orcid.org/0000-0002-9217-4723)
David Babonneau (ORCID: https://orcid.org/0000-0001-8932-5431)
Michał Kamiński (ORCID: https://orcid.org/0000-0002-0901-0809)
Andrea Resta (ORCID: https://orcid.org/0000-0002-0614-1192)
Y. Garreau (ORCID: https://orcid.org/0000-0002-7594-0262)
G ABADIAS
Alessandro Coati (ORCID: https://orcid.org/0000-0001-7732-5688)
B. Krause (ORCID: https://orcid.org/0000-0001-6288-0283)
Alina Vlad (ORCID: https://orcid.org/0000-0001-7319-0093)
Karan Solanki
Anny Michel

Institutions

Karlsruhe Institute of Technology (DE)
Université Paris Cité (FR)
Synchrotron soleil (FR)
Institut Pprime (FR)
Laboratoire Matériaux et Phénomènes Quantiques (FR)

Publication Details

Journal: SPIRE - Sciences Po Institutional REpository
Published: 2025-09-22
Primary Topic: Copper Interconnects and Reliability
Type: article
Field-Weighted Citation Impact: 0.00

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article

The role of nitrogen additive on the growth of ultrathin silver films: in situ and real-time studies during magnetron sputtering deposition

F. Pailloux, David Babonneau, Michał Kamiński, Andrea Resta et al.

Sep 22, 2025

SPIRE - Sciences Po Institutional REpository

Copper Interconnects and Reliability

article

The role of nitrogen additive on the growth of ultrathin silver films: in situ and real-time studies during magnetron sputtering deposition

F. Pailloux, David Babonneau, Michał Kamiński, Andrea Resta, Y. Garreau, G ABADIAS, Alessandro Coati, B. Krause, Alina Vlad, Karan Solanki, Anny Michel

September 22, 2025article en

Abstract

No abstract available for this paper.

SPIRE - Sciences Po Institutional REpository

Karlsruhe Institute of Technology (DE), Université Paris Cité (FR), Synchrotron soleil (FR), Institut Pprime (FR), Laboratoire Matériaux et Phénomènes Quantiques (FR)

Openalex Percentile: Top 47%

Copper Interconnects and Reliability

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