Some Properties of Argon As an Actinometric Atom. III. Parameters of the Reduced Global Model

The collisional, radiative, diffusion, and drift mechanisms necessary for constructing a reduced global model of low-pressure electric discharge plasma are examined. Calculation formulas are presented, and the reliability of the fundamental data for argon used in the kinetic equations of this model is assessed. The presented material may be useful for analyzing experimental optical emission spectroscopy data.

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Publication Details

Journal
Russian Microelectronics
Published
2025-12-01
DOI
https://doi.org/10.1134/s1063739725601572
Primary Topic
Advanced Physical and Chemical Molecular Interactions
Type
article
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article

Some Properties of Argon As an Actinometric Atom. III. Parameters of the Reduced Global Model

V. P. Kudrya
Russian Microelectronics
Advanced Physical and Chemical Molecular Interactions
article

Some Properties of Argon As an Actinometric Atom. III. Parameters of the Reduced Global Model

V. P. Kudrya
article en

Abstract

The collisional, radiative, diffusion, and drift mechanisms necessary for constructing a reduced global model of low-pressure electric discharge plasma are examined. Calculation formulas are presented, and the reliability of the fundamental data for argon used in the kinetic equations of this model is assessed. The presented material may be useful for analyzing experimental optical emission spectroscopy data.

Russian MicroelectronicsVol. 54(8)
Kurchatov Institute (RU)
Climate action
Openalex Percentile: Top 19%
Advanced Physical and Chemical Molecular Interactions
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