Micromechanical RF Switch with Metal-to-Metal Contact

MEMS switches are promising for mobile radar systems and electromagnetic warfare, but their performance has not yet reached the required level. Miniature electrostatic actuators produce weak contact force, preventing low contact resistance. In turn, low opening force leads to contact stiction. This paper presents a MEMS switch based on a microactuator with increased contact and opening forces. The design methodology, contact resistance, and microwave characteristics of the switch are described.