Recent Advances in Programmable Metasurfaces and Meta‐Devices

ABSTRACT Programmable metasurfaces enable various novel functionalities, including real‐time beam steering, high‐resolution imaging, adaptive wireless communications, and so on, by dynamically tuning electromagnetic wavefronts. These capabilities hold significant promise for transformative applications in reconfigurable antennas, smart sensing systems, and encrypted data transmission within emerging 5G/6G networks. In this article, we provide a comprehensive review of recent advances in microwave and terahertz programmable metasurfaces, encompassing various control mechanisms including electrical, thermal, optical and mechanical tuning. We begin by discussing electrically controlled metasurfaces based on Positive‐Intrinsic‐Negative(PIN) diodes or varactor diodes, highlighting their reconfigurable applications in beam scanning, imaging, and wireless communications. The review then explores the distinct advantages of liquid crystals and graphene in achieving dynamic electromagnetic control, along with representative devices. Additionally, we analyze thermally controlled metasurfaces that utilize and chalcogenide phase‐change materials, as well as optically controlled metasurfaces driven by structured light and laser excitation. Programmable metasurfaces based on micro‐electro‐mechanical systems are also discussed. Finally, the review summarizes the practical applications of programmable metasurfaces and addresses current challenges such as response speed, power consumption, and integration density. We conclude this review by presenting perspectives on the existing challenges and future directions in this fast‐growing research field.