Medium-scale integrated circuits based on p-type 2D semiconducting MoTe2

Two-dimensional (2D) semiconductors hold promise for next-generation electronics, yet the lack of scalable p-type counterparts remains a major bottleneck, with prior studies largely limited to discrete devices or simple circuits. Here we report the realization of medium-scale integrated circuits (MSICs) based on wafer-scale p-type 2D semiconductors, enabled by the controlled synthesis of uniform 4-inch 2H-MoTe<sub>2</sub> films. A precursor-engineering strategy that integrates thickness-tunable Mo precursors with a sustained-release chalcogen supply enables deterministic thickness control and wafer-scale uniformity. The resulting p-type transistors exhibit highly reproducible characteristics, including on/off ratios of ~10<sup>5</sup> and mobilities of ~7 cm<sup>2</sup> V<sup>-1</sup> s<sup>-1</sup>under low operating voltages. Leveraging a device density exceeding 1300 cm<sup>-2</sup>, we demonstrate a 140-transistor full adder, showing the potential of our approach towards the realization of future large-scale 2D complementary metal-oxide-semiconductor (CMOS) circuits.

Publication Details

Journal
Nature Communications
Published
2026-03-23
DOI
https://doi.org/10.1038/s41467-026-70992-1
Primary Topic
2D Materials and Applications
Type
article
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article

Medium-scale integrated circuits based on p-type 2D semiconducting MoTe2

Nature Communications
2D Materials and Applications
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Medium-scale integrated circuits based on p-type 2D semiconducting MoTe2

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Abstract

Two-dimensional (2D) semiconductors hold promise for next-generation electronics, yet the lack of scalable p-type counterparts remains a major bottleneck, with prior studies largely limited to discrete devices or simple circuits. Here we report the realization of medium-scale integrated circuits (MSICs) based on wafer-scale p-type 2D semiconductors, enabled by the controlled synthesis of uniform 4-inch 2H-MoTe<sub>2</sub> films. A precursor-engineering strategy that integrates thickness-tunable Mo precursors with a sustained-release chalcogen supply enables deterministic thickness control and wafer-scale uniformity. The resulting p-type transistors exhibit highly reproducible characteristics, including on/off ratios of ~10<sup>5</sup> and mobilities of ~7 cm<sup>2</sup> V<sup>-1</sup> s<sup>-1</sup>under low operating voltages. Leveraging a device density exceeding 1300 cm<sup>-2</sup>, we demonstrate a 140-transistor full adder, showing the potential of our approach towards the realization of future large-scale 2D complementary metal-oxide-semiconductor (CMOS) circuits.

Nature Communications
Openalex Percentile: Top 13%
2D Materials and Applications
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