Solid-State Electrochemistry in Microelectronics

The present minireview considers fundamental electrochemistry and its relation to microelectronics. Various solid electrolytes, principally inorganic ones are described, including LiPON, and diverse sulfide and oxide electrolytes. Examples of all-solid-state electrochemical devices important for microelectronics are described and discussed, such as electrochemical gas compressors and gas purification systems, electrochemical gas sensors, including high-temperature ones, as well microbatteries and thin-film batteries.