Application of Colloidal Lithography to Create Nanostructures
The key features of the colloidal lithography method are described, and the results obtained during the initial stage of its development for solving problems of manufacturing thin-film nanostructure arrays on a substrate surface, as well as problems of surface nanostructuring, are discussed. The presented material can be useful for analyzing the potential for expanding the scope of colloidal lithography.
Authors
- V. P. Kudrya
Institutions
- Kurchatov Institute (RU)
Publication Details
- Journal
- Russian Microelectronics
- Published
- 2025-12-01
- DOI
- https://doi.org/10.1134/s1063739725601523
- Primary Topic
- Nanofabrication and Lithography Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00