Application of Colloidal Lithography to Create Nanostructures

The key features of the colloidal lithography method are described, and the results obtained during the initial stage of its development for solving problems of manufacturing thin-film nanostructure arrays on a substrate surface, as well as problems of surface nanostructuring, are discussed. The presented material can be useful for analyzing the potential for expanding the scope of colloidal lithography.

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Publication Details

Journal
Russian Microelectronics
Published
2025-12-01
DOI
https://doi.org/10.1134/s1063739725601523
Primary Topic
Nanofabrication and Lithography Techniques
Type
article
Field-Weighted Citation Impact
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article

Application of Colloidal Lithography to Create Nanostructures

V. P. Kudrya
Russian Microelectronics
Nanofabrication and Lithography Techniques
article

Application of Colloidal Lithography to Create Nanostructures

V. P. Kudrya
article en

Abstract

The key features of the colloidal lithography method are described, and the results obtained during the initial stage of its development for solving problems of manufacturing thin-film nanostructure arrays on a substrate surface, as well as problems of surface nanostructuring, are discussed. The presented material can be useful for analyzing the potential for expanding the scope of colloidal lithography.

Russian MicroelectronicsVol. 54(8)
Kurchatov Institute (RU)
Openalex Percentile: Top 36%
Nanofabrication and Lithography Techniques
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