Pressure-induced emission of dopant-free SU-8 for passive photonic devices

SU-8, a widely used negative-tone photoresist in microelectronics, has low optical loss and excellent processability, making it promising for photonic integrated devices. However, most existing SU-8-based passive photonic devices rely on dye doping to enhance luminescent performance, increasing fabrication complexity. Here, we applied pressure treatment to four types of SU-8 micropatterns prepared by photolithography, which exhibited intense blue-white emission after pressure release and achieved a 15-fold enhancement. This study demonstrates dye-free photoluminescence enhancement in SU-8, providing a new strategy for SU-8-based passive photonic integration.

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Publication Details

Journal
Applied Physics Letters
Published
2026-03-16
DOI
https://doi.org/10.1063/5.0314919
Primary Topic
Photonic and Optical Devices
Type
article
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article

Pressure-induced emission of dopant-free SU-8 for passive photonic devices

Shun‐Xin Li, Chenyang Zhang, Xin Wang, B. S. Zou et al.
Applied Physics Letters
Photonic and Optical Devices
article

Pressure-induced emission of dopant-free SU-8 for passive photonic devices

Shun‐Xin Li, Chenyang Zhang, Xin Wang, B. S. Zou, Zongxuan Liu, Yuqing Wang, Ying-Li Ma, Jin-Cheng Lei, Yining Meng, Yang Wang, Rui Wei
article en

Abstract

SU-8, a widely used negative-tone photoresist in microelectronics, has low optical loss and excellent processability, making it promising for photonic integrated devices. However, most existing SU-8-based passive photonic devices rely on dye doping to enhance luminescent performance, increasing fabrication complexity. Here, we applied pressure treatment to four types of SU-8 micropatterns prepared by photolithography, which exhibited intense blue-white emission after pressure release and achieved a 15-fold enhancement. This study demonstrates dye-free photoluminescence enhancement in SU-8, providing a new strategy for SU-8-based passive photonic integration.

Applied Physics LettersVol. 128(11)
Jilin University (CN)
Openalex Percentile: Top 16%
Photonic and Optical Devices
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