The Evolution of Cryogenic Etching Plasma Processes Since Their Introduction 35 Years Ago

Authors

Institutions

Publication Details

Journal
SPIRE - Sciences Po Institutional REpository
Published
2024-11-03
Primary Topic
Plasma Diagnostics and Applications
Type
article
Field-Weighted Citation Impact
0.00
Controls
|||
ALL TIME
JAN
FEB
MAR
APR
MAY
JUN
JUL
AUG
SEP
OCT
article

The Evolution of Cryogenic Etching Plasma Processes Since Their Introduction 35 Years Ago

Rémi Dussart
SPIRE - Sciences Po Institutional REpository
Plasma Diagnostics and Applications
article

The Evolution of Cryogenic Etching Plasma Processes Since Their Introduction 35 Years Ago

Rémi Dussart
article en

Abstract

No abstract available for this paper.
SPIRE - Sciences Po Institutional REpository
Groupe de Recherches sur l'Energétique des Milieux Ionisés (FR)
Openalex Percentile: Top 55%
Plasma Diagnostics and Applications
OpenAlex
AI Navigator

Ask Laika to Summarize, Analyze, and Connect papers live on the map.

Summarize Papers & Methodologies

Extract key findings, datasets, and comparative methods across publications.

Benchmark Rankings & Visual Analytics

Rank top research institutions, authors, funders, topics, and journals by Field-Weighted Citation Impact (FWCI) and paper volume with instant charts.

Connect Distant Disciplines

Bridge topological clusters on the map to find hidden collaborative intersections.

The Evolution of Cryogenic Etching Plasma Processes Since Their Introduction 35 Years Ago — Rémi Dussart · SPIRE - Sciences Po Institutional REpository (2024) | TGRS Research Map | TGRS