Renewed interest in cryogenic etching processes: what are the advantages of cooling the substrate ?

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SPIRE - Sciences Po Institutional REpository
Published
2025-01-28
Primary Topic
Silicon and Solar Cell Technologies
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Renewed interest in cryogenic etching processes: what are the advantages of cooling the substrate ?

Rémi Dussart
SPIRE - Sciences Po Institutional REpository
Silicon and Solar Cell Technologies
article

Renewed interest in cryogenic etching processes: what are the advantages of cooling the substrate ?

Rémi Dussart
article en

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No abstract available for this paper.
SPIRE - Sciences Po Institutional REpository
Groupe de Recherches sur l'Energétique des Milieux Ionisés (FR)
Climate action
Openalex Percentile: Top 33%
Silicon and Solar Cell Technologies
OpenAlex
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Renewed interest in cryogenic etching processes: what are the advantages of cooling the substrate ? — Rémi Dussart · SPIRE - Sciences Po Institutional REpository (2025) | TGRS Research Map | TGRS