An advanced hybrid LaserFIB/PFIB approach for single-crystal copper micro-tensile specimen fabrication

The mechanical size effect of samples produced by PFIB and LaserFIB machining was determined by analyzing micro-tensile specimens of ⟨001⟩-oriented single-crystal copper. The LaserFIB attachment offers a significant advantage by dramatically increasing material removal rates for meso- and microscale specimens compared to PFIB milling, making the specimen preparation workflow 2 to 3 times faster than using the PFIB alone, a time advantage that becomes even more pronounced as the number of samples increases. Incorporating PFIB trimming after laser ablation further enhances shape accuracy. Overall, this combined methodology proved to be an optimal route for the efficient and accurate production of micro-tensile specimens. In addition, copper tensile specimens exhibiting multi-slip deformation through the activation of multiple crystallographic slip systems along different planar directions, while localized single-slip behavior was also observed. • Hybrid LaserFIB/PFIB greatly reduces specimen preparation time. • LaserFIB increases material removal rates in micro-tensile fabrication. • PFIB trimming enhances dimensional accuracy after laser ablation. • Size effect seen: yield strength rises as gauge area decreases. • Predominant multi-slip deformation observed in SC copper tests.