A Tunable Integrated Gas Flow Regulator-Heater Module for Miniaturized Propulsion Systems

This paper presents the design, fabrication, and experimental characterization of a novel monolithically integrated gas flow regulator-heater module based on MEMS technology. The device is capable of hightemperature operation (up to 700° C) and high-pressure gas flow control, specifically designed for the challenging decomposition requirements of nitrous oxide (<tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\mathrm{N}_{2} \mathrm{O}$</tex>) monopropellant thrusters. The flow resistance of the novel 3D serpentine architecture can be accurately predicted using Poiseuille's law, enabling straightforward scaling of performance across different mission requirements.