Fundamentals of Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) and Safety Management of Chemical Substances

Professor Atsushi Sekiguchi, author of this lecture series, worked at Canon Anelva Corporation from 1982 to 2016, where he was involved in the development of chemical vapor deposition (CVD) method. He has also contributed to the educational activities related to vacuum science and technology and thin film as a member of the Education Committee of the Japan Society of Vacuum and Surface Science (JVSS). This lecture series, “Fundamentals of Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) and Safety Management of Chemical Substances”, introduces key points from the extensive teaching materials he developed over many years of educational work.