Technical notes on custom-made parylene deposition system (Rutgers University).
These technical notes describe in detail the parylene deposition process using a small-scale, custom-designed parylene deposition system built at Rurgers University. The notes also provide a few useful links to the parylene properties and original research papers on parylene deposition and its technological applications.
Authors
- Vladimir V. Bruevich (ORCID: https://orcid.org/0000-0003-3643-5391)
- Vitaly Podzorov (ORCID: https://orcid.org/0000-0001-8276-882X)
Institutions
- Rutgers, The State University of New Jersey (US)
Publication Details
- Journal
- Zenodo (CERN European Organization for Nuclear Research)
- Published
- 2026-03-07
- DOI
- https://doi.org/10.5281/zenodo.18905437
- Primary Topic
- Neuroscience and Neural Engineering
- Type
- article
- Field-Weighted Citation Impact
- 0.00