On Approach to Optimize Manufacturing of P-N-heterojunctions in Tframework of a Multilevel Inverter with R-Load to Increase their Integration Rate. On Influence Mismatch-Induced Stress
In this paper we introduce an approach to increase density of p-n-heterojunctions in the framework of a multilevel inverter with R-load. In the framework of the approach we consider manufacturing the inverter in heterostructure with specific configuration. Several required areas of the heterostructure should be doped by diffusion or ion implantation. After that dopant and radiation defects should by annealed framework optimized scheme. We also consider an approach to decrease value of mismatch-induced stress in the considered heterostructure. We introduce an analytical approach to analyze mass and heat transport in heterostructures during manufacturing of integrated circuits with account mismatch-induced stress.
Authors
- Evgeniya Sergeevna Pankratova
Institutions
- N. I. Lobachevsky State University of Nizhny Novgorod (RU)
Publication Details
- Journal
- Zenodo (CERN European Organization for Nuclear Research)
- Published
- 2025-01-28
- DOI
- https://doi.org/10.5281/zenodo.18862284
- Primary Topic
- Silicon Carbide Semiconductor Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00