Plasma Regeneration of Microparticle-Structured Surface Acoustic Wave Resonators for Use as Biosensors

Plasma regeneration was investigated as a means of regenerating microstructures on biosensors for repeated use. These microstructures were based on the deposition of suspensions containing polymer microspheres. While this method provides a simple way to structure surfaces, obtaining regular structures in a reproducible way remains a challenge. Therefore, it would be advantageous to be able to reuse regular structures, which requires regeneration. To investigate this concept, surface acoustic wave (SAW) resonators were structured using 5 µm and 20 µm polystyrene microspheres and coated with parylene C to stabilize the particle structures. After use in bioanalytical experiments, the biological residues and the parylene C cover layer were removed with plasma, and a new parylene C layer was added. Both atmospheric and low-pressure plasma were tested for regeneration. As a result, the low-pressure plasma was to be preferred because it did not damage the transducer structures on the SAW resonators, unlike the atmospheric plasma. Water contact angle measurements and transmission spectra recorded with a network analyzer confirmed that freshly prepared and regenerated structured SAW resonators coated with parylene C exhibited similar wetting properties and resonance parameters. Therefore, plasma regeneration is an effective way to enable the reuse of perfectly structured SAW resonators.