Experimental Investigation of Pixelated Instantaneous Phase-Shifting Interferometry Using Liquid Crystal Spatial Light Modulator

A pixelated instantaneous phase-shifting interferometry (PSI) using a phase-only liquid crystal spatial light modulator (LC-SLM) is developed and experimentally validated. The LC-SLM generates high-frequency spatial phase modulation and introduces pixelated instantaneous phase-shifting between two incident orthogonal linearly polarized beams propagating along the same optical path. A single-frame pixelated phase-shifted interferogram is captured in one exposure, and the wavefront phase is reconstructed subsequently by using the proposed loop retrieval algorithm. In the experimental investigation, an interference region segmentation method based on wavefront-modulated sequential images is firstly developed to realize precise alignment between LC-SLM pixels and CCD pixels. Secondly, based on the PSI setup established, wavefront measurement experiments for system aberration, tilted wavefront and defocused wavefront are performed. Experimental results show that the root-mean-square (RMS) value of the residual wavefront between the retrieved tilted wavefront and its fitting plane is 0.046 λ. Furthermore, the RMS value of the residual wavefront between the defocused wavefront retrieved by the proposed method and the eight-step phase-shifting method is 0.075 λ, which verifies the effectiveness of the proposed approach. This work provides a simple and rapidly deployable solution for single-shot interferometric measurement.