High Sensitivity Piezoresistive Microsystem With Quad Island Beam Architecture Through Design Curve Fitting and Parametric Analysis for Low‐Pressure Detection

This work introduces a new piezoresistive pressure sensor based on micro electro mechanical systems that has a circular diaphragm structure integrated with a sensitive, cross and square quad island beams design developed for low‐pressure applications. This structure enhances the stress concentration areas and sensitivity. This setup makes it possible to measure pressure accurately and consistently in low‐pressure moments. Finite element analysis (FEA) using COMSOL was performed to evaluate the stresses induced subjected to piezoresistors and the diaphragm deflection under an applied pressure limit up to 10 kPa. The mechanical properties of the sensor were theoretically evaluated in relation to its structural parameters using FEA and curve fitting techniques. High sensitivity and low nonlinearity were achieved by optimizing the structural parameters dimension of the mathematical model. The structural dimensions were optimized using MATLAB to achieve the superior performance. Our proposed sensor achieved a sensitivity of 52.6 mV/V/kPa and a nonlinearity error of under a pressure range of 0–10 kPa, demonstrating improved performance diverging from established findings.