Fabrication of low-loss silicon nitride PICs for stimulated Brillouin scattering

Silicon nitride (Si<sub>3</sub>N<sub>4</sub>) is well-established in PIC technology due to its low loss, broad transparency and seamless compatibility with existing semiconductor fabrication processes. We have developed a thin Si<sub>3</sub>N<sub>4</sub> platform supporting low-loss waveguiding and high-Q resonators. We measure stimulated Brillouin scattering using a lock-in amplifier, enabling the development of future high-performance acousto-optic devices.<br/>

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Publication Details

Journal
University of Twente Research Information
Published
2024-10-16
Primary Topic
Mechanical and Optical Resonators
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article
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article

Fabrication of low-loss silicon nitride PICs for stimulated Brillouin scattering

Ahmet Tarık Işık, P.J.M.; id_orcid 0000-0001-7473-1752 van der Slot, David; id_orcid 0000-0002-5434-7195 Marpaung, Randy te Morsche et al.
University of Twente Research Information
Mechanical and Optical Resonators
article

Fabrication of low-loss silicon nitride PICs for stimulated Brillouin scattering

Ahmet Tarık Işık, P.J.M.; id_orcid 0000-0001-7473-1752 van der Slot, David; id_orcid 0000-0002-5434-7195 Marpaung, Randy te Morsche, Zheng Zheng, Akshay; id_orcid 0009-0003-6933-2994 Keloth
article en

Abstract

Silicon nitride (Si<sub>3</sub>N<sub>4</sub>) is well-established in PIC technology due to its low loss, broad transparency and seamless compatibility with existing semiconductor fabrication processes. We have developed a thin Si<sub>3</sub>N<sub>4</sub> platform supporting low-loss waveguiding and high-Q resonators. We measure stimulated Brillouin scattering using a lock-in amplifier, enabling the development of future high-performance acousto-optic devices.<br/>

University of Twente Research Information
Openalex Percentile: Top 48%
Mechanical and Optical Resonators
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Fabrication of low-loss silicon nitride PICs for stimulated Brillouin scattering — Ahmet Tarık Işık, P.J.M.; id_orcid 0000-0001-7473-1752 van der Slot, et al. · University of Twente Research Information (2024) | TGRS Research Map | TGRS