Harmonic suppression gratings for soft X-ray monochromators

We describe an approach to harmonic suppression in soft X-ray monochromators by engineering the reflection grating's diffraction pattern to approximate a sinusoidal amplitude. At synchrotron and free-electron laser sources, X-ray beamlines powered by insertion devices produce a spectrum containing harmonic photon energies that can couple unwanted light into experiments. Beamlines in the soft X-ray energy range (100 eV to 2 keV) commonly employ energy-filtering elements to suppress these harmonics. Available approaches tend to be inefficient, significantly reducing the transmitted power. We show that with pseudo-grayscale binary halftone patterns, gratings can approximate a sinusoidal amplitude and suppress higher diffraction orders. Prototype demonstrations of lithographically fabricated gratings were conducted on a soft X-ray beamline with photon energies of 110 eV and 330 eV. Relative to a square-wave amplitude grating, the third-harmonic intensity was reduced by a factor of 9.0 with a first-order efficiency reduction of 38%.