Aerosol-assisted chemical vapor deposition of ZnS nanoleaves with optical sensitivity to gases

A novel route for synthesizing ZnS nanostructured films via aerosol-assisted chemical vapor deposition (AACVD) is developed using the co-deposition of ((CH 3 -CH 2 ) 4 P 2 S 2 ) and ZnCl 2 reactants. Analysis of the films (600-700 nm thick) confirms the formation of hexagonal ZnS nanoleaves with non-stoichiometric sulfide defects at the surface, ∼93 % absorbance in the UV region (300-400 nm), and ∼60 % transmittance in the visible region (500-600 nm). Gas sensing tests conducted at room temperature (26 °C) under deuterium/halogen illumination, demonstrate the film's optical sensitivity to gases, in particular toluene and nitrogen dioxide, in the UV range (λ = 360 nm). In humid environments (40 % RH), the ZnS films exhibit a loss of the optical sensitivity to gases attributed to the formation of a ZnO overlayer on the ZnS surface. These results confirm the optical gas sensitivity of the AACVD co-deposited ZnS nanostructures, offering an alternative to both conventional resistance-based gas sensing approaches and traditional nanostructure synthesis methods.

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Publication Details

Journal
Materials Science in Semiconductor Processing
Published
2026-02-17
DOI
https://doi.org/10.1016/j.mssp.2026.110510
Primary Topic
Quantum Dots Synthesis And Properties
Type
article
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article

Aerosol-assisted chemical vapor deposition of ZnS nanoleaves with optical sensitivity to gases

Stella Vallejos, Khaled Alouani, Isabel Gràcia, Houyem Trabelsi
Materials Science in Semiconductor Processing
Quantum Dots Synthesis And Properties
article

Aerosol-assisted chemical vapor deposition of ZnS nanoleaves with optical sensitivity to gases

Stella Vallejos, Khaled Alouani, Isabel Gràcia, Houyem Trabelsi
article en

Abstract

A novel route for synthesizing ZnS nanostructured films via aerosol-assisted chemical vapor deposition (AACVD) is developed using the co-deposition of ((CH 3 -CH 2 ) 4 P 2 S 2 ) and ZnCl 2 reactants. Analysis of the films (600-700 nm thick) confirms the formation of hexagonal ZnS nanoleaves with non-stoichiometric sulfide defects at the surface, ∼93 % absorbance in the UV region (300-400 nm), and ∼60 % transmittance in the visible region (500-600 nm). Gas sensing tests conducted at room temperature (26 °C) under deuterium/halogen illumination, demonstrate the film's optical sensitivity to gases, in particular toluene and nitrogen dioxide, in the UV range (λ = 360 nm). In humid environments (40 % RH), the ZnS films exhibit a loss of the optical sensitivity to gases attributed to the formation of a ZnO overlayer on the ZnS surface. These results confirm the optical gas sensitivity of the AACVD co-deposited ZnS nanostructures, offering an alternative to both conventional resistance-based gas sensing approaches and traditional nanostructure synthesis methods.

Materials Science in Semiconductor ProcessingVol. 208
Universitat Autònoma de Barcelona (ES), Institut de Microelectrònica de Barcelona (ES), Tunis El Manar University (TN)
Openalex Percentile: Top 54%
Quantum Dots Synthesis And Properties
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