In Situ Electron Microscopy for Plasma-Enabled Nanoengineering

Abstract Non-thermal plasma is a versatile tool for nanoengineering applications. Nonetheless describing the typical highly dynamic mechanisms underpinning these applications remains a significant challenge, as insights have traditionally relied on postmortem analysis. Electron microscopy (EM) is routinely used for visualizing small scale structures, surpassing the diffraction limit of optical microscopy. In situ EM offers a powerful pathway to directly observe small scale processes in real-time for a broad range of research fields. However, integrating plasma environments with the high-vacuum conditions of electron microscopes remains a formidable technical challenge. This article provides an overview of in situ EM applications in the field of plasmas. We summarize early implementations of in situ plasma EM, highlight recent technical advancements and key findings, and propose future developments beneficial for advancing the field of plasma nanoengineering.