Structure and Properties of Titania Coatings Formed by the Plasma-Assisted Vacuum Arc Method
Titania coatings have been formed by the plasma-assisted vacuum arc deposition, and their structure, phase composition, and properties have been studied in detail. It has been shown that the discharge current of the gas plasma source is a key parameter for controlling the polymorphic composition, hardness, and wear resistance of the titania coating. Titania is present in the coatings in two polymorphs, namely, rutile and anatase; their relative content depends on plasma assistance conditions. Titania coatings, regardless of the plasma assistance mode, are a nanocrystalline material with a columnar structure.
Authors
- Yu. F. Ivanov
- E. A. Petrikova
- N. A. Prokopenko
- N. N. Koval
- O. S. Tolkachev
- O. V. Krysina
Institutions
- Institute of High Current Electronics (RU)
Publication Details
- Journal
- High Energy Chemistry
- Published
- 2025-12-01
- DOI
- https://doi.org/10.1134/s0018143925601411
- Primary Topic
- Metal and Thin Film Mechanics
- Type
- article
- Field-Weighted Citation Impact
- 0.00